JPS5390765A - Mask structure - Google Patents

Mask structure

Info

Publication number
JPS5390765A
JPS5390765A JP518977A JP518977A JPS5390765A JP S5390765 A JPS5390765 A JP S5390765A JP 518977 A JP518977 A JP 518977A JP 518977 A JP518977 A JP 518977A JP S5390765 A JPS5390765 A JP S5390765A
Authority
JP
Japan
Prior art keywords
mask structure
arraying
pellets
integration
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP518977A
Other languages
Japanese (ja)
Inventor
Tadashi Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP518977A priority Critical patent/JPS5390765A/en
Publication of JPS5390765A publication Critical patent/JPS5390765A/en
Pending legal-status Critical Current

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  • Design And Manufacture Of Integrated Circuits (AREA)

Abstract

PURPOSE: To achieve the improvement in the scale of integration of pellets by arraying regular hexagonal connection holes.
COPYRIGHT: (C)1978,JPO&Japio
JP518977A 1977-01-19 1977-01-19 Mask structure Pending JPS5390765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP518977A JPS5390765A (en) 1977-01-19 1977-01-19 Mask structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP518977A JPS5390765A (en) 1977-01-19 1977-01-19 Mask structure

Publications (1)

Publication Number Publication Date
JPS5390765A true JPS5390765A (en) 1978-08-09

Family

ID=11604264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP518977A Pending JPS5390765A (en) 1977-01-19 1977-01-19 Mask structure

Country Status (1)

Country Link
JP (1) JPS5390765A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018520386A (en) * 2015-07-15 2018-07-26 シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド Exposure apparatus and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018520386A (en) * 2015-07-15 2018-07-26 シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド Exposure apparatus and method

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