JPS5390052U - - Google Patents
Info
- Publication number
- JPS5390052U JPS5390052U JP17430676U JP17430676U JPS5390052U JP S5390052 U JPS5390052 U JP S5390052U JP 17430676 U JP17430676 U JP 17430676U JP 17430676 U JP17430676 U JP 17430676U JP S5390052 U JPS5390052 U JP S5390052U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976174306U JPS575519Y2 (fi) | 1976-12-25 | 1976-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976174306U JPS575519Y2 (fi) | 1976-12-25 | 1976-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5390052U true JPS5390052U (fi) | 1978-07-24 |
| JPS575519Y2 JPS575519Y2 (fi) | 1982-02-02 |
Family
ID=28781772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976174306U Expired JPS575519Y2 (fi) | 1976-12-25 | 1976-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS575519Y2 (fi) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5646798U (fi) * | 1979-08-31 | 1981-04-25 | ||
| JP2016151043A (ja) * | 2015-02-17 | 2016-08-22 | 三井金属鉱業株式会社 | セラミックス製ターゲット材の製造方法および円筒形スパッタリングターゲット |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016136088A1 (ja) * | 2015-02-25 | 2016-09-01 | 三井金属鉱業株式会社 | 円筒形ターゲット材の製造方法、円筒形スパッタリングターゲットおよび焼成用治具 |
-
1976
- 1976-12-25 JP JP1976174306U patent/JPS575519Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5646798U (fi) * | 1979-08-31 | 1981-04-25 | ||
| JP2016151043A (ja) * | 2015-02-17 | 2016-08-22 | 三井金属鉱業株式会社 | セラミックス製ターゲット材の製造方法および円筒形スパッタリングターゲット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS575519Y2 (fi) | 1982-02-02 |