JPS5390052U - - Google Patents

Info

Publication number
JPS5390052U
JPS5390052U JP17430676U JP17430676U JPS5390052U JP S5390052 U JPS5390052 U JP S5390052U JP 17430676 U JP17430676 U JP 17430676U JP 17430676 U JP17430676 U JP 17430676U JP S5390052 U JPS5390052 U JP S5390052U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17430676U
Other languages
Japanese (ja)
Other versions
JPS575519Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976174306U priority Critical patent/JPS575519Y2/ja
Publication of JPS5390052U publication Critical patent/JPS5390052U/ja
Application granted granted Critical
Publication of JPS575519Y2 publication Critical patent/JPS575519Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Charging Or Discharging (AREA)
JP1976174306U 1976-12-25 1976-12-25 Expired JPS575519Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976174306U JPS575519Y2 (en) 1976-12-25 1976-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976174306U JPS575519Y2 (en) 1976-12-25 1976-12-25

Publications (2)

Publication Number Publication Date
JPS5390052U true JPS5390052U (en) 1978-07-24
JPS575519Y2 JPS575519Y2 (en) 1982-02-02

Family

ID=28781772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976174306U Expired JPS575519Y2 (en) 1976-12-25 1976-12-25

Country Status (1)

Country Link
JP (1) JPS575519Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646798U (en) * 1979-08-31 1981-04-25
JP2016151043A (en) * 2015-02-17 2016-08-22 三井金属鉱業株式会社 Production method of target material made of ceramic, and cylindrical sputtering target

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6678157B2 (en) * 2015-02-25 2020-04-08 三井金属鉱業株式会社 Method for manufacturing cylindrical target material and method for manufacturing cylindrical sputtering target

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646798U (en) * 1979-08-31 1981-04-25
JP2016151043A (en) * 2015-02-17 2016-08-22 三井金属鉱業株式会社 Production method of target material made of ceramic, and cylindrical sputtering target

Also Published As

Publication number Publication date
JPS575519Y2 (en) 1982-02-02

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