JPS5383078U - - Google Patents
Info
- Publication number
- JPS5383078U JPS5383078U JP16734776U JP16734776U JPS5383078U JP S5383078 U JPS5383078 U JP S5383078U JP 16734776 U JP16734776 U JP 16734776U JP 16734776 U JP16734776 U JP 16734776U JP S5383078 U JPS5383078 U JP S5383078U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16734776U JPS569976Y2 (en:Method) | 1976-12-13 | 1976-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16734776U JPS569976Y2 (en:Method) | 1976-12-13 | 1976-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5383078U true JPS5383078U (en:Method) | 1978-07-10 |
| JPS569976Y2 JPS569976Y2 (en:Method) | 1981-03-05 |
Family
ID=28775038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16734776U Expired JPS569976Y2 (en:Method) | 1976-12-13 | 1976-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS569976Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61292336A (ja) * | 1985-06-20 | 1986-12-23 | Matsushita Electric Ind Co Ltd | ウエハ−保持装置 |
-
1976
- 1976-12-13 JP JP16734776U patent/JPS569976Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61292336A (ja) * | 1985-06-20 | 1986-12-23 | Matsushita Electric Ind Co Ltd | ウエハ−保持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS569976Y2 (en:Method) | 1981-03-05 |