JPS5383078U - - Google Patents

Info

Publication number
JPS5383078U
JPS5383078U JP16734776U JP16734776U JPS5383078U JP S5383078 U JPS5383078 U JP S5383078U JP 16734776 U JP16734776 U JP 16734776U JP 16734776 U JP16734776 U JP 16734776U JP S5383078 U JPS5383078 U JP S5383078U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16734776U
Other languages
Japanese (ja)
Other versions
JPS569976Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16734776U priority Critical patent/JPS569976Y2/ja
Publication of JPS5383078U publication Critical patent/JPS5383078U/ja
Application granted granted Critical
Publication of JPS569976Y2 publication Critical patent/JPS569976Y2/ja
Expired legal-status Critical Current

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  • Investigating Or Analysing Materials By Optical Means (AREA)
JP16734776U 1976-12-13 1976-12-13 Expired JPS569976Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16734776U JPS569976Y2 (enrdf_load_stackoverflow) 1976-12-13 1976-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16734776U JPS569976Y2 (enrdf_load_stackoverflow) 1976-12-13 1976-12-13

Publications (2)

Publication Number Publication Date
JPS5383078U true JPS5383078U (enrdf_load_stackoverflow) 1978-07-10
JPS569976Y2 JPS569976Y2 (enrdf_load_stackoverflow) 1981-03-05

Family

ID=28775038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16734776U Expired JPS569976Y2 (enrdf_load_stackoverflow) 1976-12-13 1976-12-13

Country Status (1)

Country Link
JP (1) JPS569976Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61292336A (ja) * 1985-06-20 1986-12-23 Matsushita Electric Ind Co Ltd ウエハ−保持装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61292336A (ja) * 1985-06-20 1986-12-23 Matsushita Electric Ind Co Ltd ウエハ−保持装置

Also Published As

Publication number Publication date
JPS569976Y2 (enrdf_load_stackoverflow) 1981-03-05

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