JPS538093Y2 - - Google Patents

Info

Publication number
JPS538093Y2
JPS538093Y2 JP8173873U JP8173873U JPS538093Y2 JP S538093 Y2 JPS538093 Y2 JP S538093Y2 JP 8173873 U JP8173873 U JP 8173873U JP 8173873 U JP8173873 U JP 8173873U JP S538093 Y2 JPS538093 Y2 JP S538093Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8173873U
Other languages
Japanese (ja)
Other versions
JPS5028419U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8173873U priority Critical patent/JPS538093Y2/ja
Publication of JPS5028419U publication Critical patent/JPS5028419U/ja
Application granted granted Critical
Publication of JPS538093Y2 publication Critical patent/JPS538093Y2/ja
Expired legal-status Critical Current

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JP8173873U 1973-07-10 1973-07-10 Expired JPS538093Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8173873U JPS538093Y2 (en) 1973-07-10 1973-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8173873U JPS538093Y2 (en) 1973-07-10 1973-07-10

Publications (2)

Publication Number Publication Date
JPS5028419U JPS5028419U (en) 1975-04-01
JPS538093Y2 true JPS538093Y2 (en) 1978-03-02

Family

ID=28260460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8173873U Expired JPS538093Y2 (en) 1973-07-10 1973-07-10

Country Status (1)

Country Link
JP (1) JPS538093Y2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0113428Y2 (en) * 1980-09-11 1989-04-19
JP6303024B2 (en) * 2013-12-23 2018-03-28 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated Holding arrangement for holding a substrate under a vacuum process, apparatus for depositing a layer on a substrate, and method for transporting a holding arrangement

Also Published As

Publication number Publication date
JPS5028419U (en) 1975-04-01

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