JPS538054A - Slicing method of semiconductor materials - Google Patents

Slicing method of semiconductor materials

Info

Publication number
JPS538054A
JPS538054A JP8196376A JP8196376A JPS538054A JP S538054 A JPS538054 A JP S538054A JP 8196376 A JP8196376 A JP 8196376A JP 8196376 A JP8196376 A JP 8196376A JP S538054 A JPS538054 A JP S538054A
Authority
JP
Japan
Prior art keywords
semiconductor materials
slicing method
speed
weft
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8196376A
Other languages
English (en)
Inventor
Shinzaburo Iwabuchi
Mitsunobu Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8196376A priority Critical patent/JPS538054A/ja
Publication of JPS538054A publication Critical patent/JPS538054A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP8196376A 1976-07-12 1976-07-12 Slicing method of semiconductor materials Pending JPS538054A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8196376A JPS538054A (en) 1976-07-12 1976-07-12 Slicing method of semiconductor materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8196376A JPS538054A (en) 1976-07-12 1976-07-12 Slicing method of semiconductor materials

Publications (1)

Publication Number Publication Date
JPS538054A true JPS538054A (en) 1978-01-25

Family

ID=13761148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8196376A Pending JPS538054A (en) 1976-07-12 1976-07-12 Slicing method of semiconductor materials

Country Status (1)

Country Link
JP (1) JPS538054A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62271668A (ja) * 1985-07-31 1987-11-25 Yasunaga Tekkosho:Kk ワイヤソ−の加工作業自動制御方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62271668A (ja) * 1985-07-31 1987-11-25 Yasunaga Tekkosho:Kk ワイヤソ−の加工作業自動制御方法及び装置

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