JPS5377670U - - Google Patents

Info

Publication number
JPS5377670U
JPS5377670U JP15998776U JP15998776U JPS5377670U JP S5377670 U JPS5377670 U JP S5377670U JP 15998776 U JP15998776 U JP 15998776U JP 15998776 U JP15998776 U JP 15998776U JP S5377670 U JPS5377670 U JP S5377670U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15998776U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15998776U priority Critical patent/JPS5377670U/ja
Publication of JPS5377670U publication Critical patent/JPS5377670U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP15998776U 1976-11-29 1976-11-29 Pending JPS5377670U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15998776U JPS5377670U (enrdf_load_stackoverflow) 1976-11-29 1976-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15998776U JPS5377670U (enrdf_load_stackoverflow) 1976-11-29 1976-11-29

Publications (1)

Publication Number Publication Date
JPS5377670U true JPS5377670U (enrdf_load_stackoverflow) 1978-06-28

Family

ID=28767889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15998776U Pending JPS5377670U (enrdf_load_stackoverflow) 1976-11-29 1976-11-29

Country Status (1)

Country Link
JP (1) JPS5377670U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3474021A (en) * 1966-01-12 1969-10-21 Ibm Method of forming openings using sequential sputtering and chemical etching

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3474021A (en) * 1966-01-12 1969-10-21 Ibm Method of forming openings using sequential sputtering and chemical etching

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