JPS5647950Y2 - - Google Patents

Info

Publication number
JPS5647950Y2
JPS5647950Y2 JP1976178444U JP17844476U JPS5647950Y2 JP S5647950 Y2 JPS5647950 Y2 JP S5647950Y2 JP 1976178444 U JP1976178444 U JP 1976178444U JP 17844476 U JP17844476 U JP 17844476U JP S5647950 Y2 JPS5647950 Y2 JP S5647950Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976178444U
Other languages
Japanese (ja)
Other versions
JPS5394565U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976178444U priority Critical patent/JPS5647950Y2/ja
Publication of JPS5394565U publication Critical patent/JPS5394565U/ja
Application granted granted Critical
Publication of JPS5647950Y2 publication Critical patent/JPS5647950Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1976178444U 1976-12-29 1976-12-29 Expired JPS5647950Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976178444U JPS5647950Y2 (enrdf_load_stackoverflow) 1976-12-29 1976-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976178444U JPS5647950Y2 (enrdf_load_stackoverflow) 1976-12-29 1976-12-29

Publications (2)

Publication Number Publication Date
JPS5394565U JPS5394565U (enrdf_load_stackoverflow) 1978-08-01
JPS5647950Y2 true JPS5647950Y2 (enrdf_load_stackoverflow) 1981-11-10

Family

ID=28785672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976178444U Expired JPS5647950Y2 (enrdf_load_stackoverflow) 1976-12-29 1976-12-29

Country Status (1)

Country Link
JP (1) JPS5647950Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4397724A (en) * 1981-08-24 1983-08-09 Bell Telephone Laboratories, Incorporated Apparatus and method for plasma-assisted etching of wafers

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3474021A (en) * 1966-01-12 1969-10-21 Ibm Method of forming openings using sequential sputtering and chemical etching

Also Published As

Publication number Publication date
JPS5394565U (enrdf_load_stackoverflow) 1978-08-01

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