JPS5376755A - Modulation method of plasma density - Google Patents

Modulation method of plasma density

Info

Publication number
JPS5376755A
JPS5376755A JP15190576A JP15190576A JPS5376755A JP S5376755 A JPS5376755 A JP S5376755A JP 15190576 A JP15190576 A JP 15190576A JP 15190576 A JP15190576 A JP 15190576A JP S5376755 A JPS5376755 A JP S5376755A
Authority
JP
Japan
Prior art keywords
modulation method
plasma density
sensity
plasmas
ultrasonic waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15190576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS574093B2 (enExample
Inventor
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15190576A priority Critical patent/JPS5376755A/ja
Publication of JPS5376755A publication Critical patent/JPS5376755A/ja
Publication of JPS574093B2 publication Critical patent/JPS574093B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
JP15190576A 1976-12-20 1976-12-20 Modulation method of plasma density Granted JPS5376755A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15190576A JPS5376755A (en) 1976-12-20 1976-12-20 Modulation method of plasma density

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15190576A JPS5376755A (en) 1976-12-20 1976-12-20 Modulation method of plasma density

Publications (2)

Publication Number Publication Date
JPS5376755A true JPS5376755A (en) 1978-07-07
JPS574093B2 JPS574093B2 (enExample) 1982-01-25

Family

ID=15528748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15190576A Granted JPS5376755A (en) 1976-12-20 1976-12-20 Modulation method of plasma density

Country Status (1)

Country Link
JP (1) JPS5376755A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04111313A (ja) * 1990-08-31 1992-04-13 Mitsubishi Electric Corp 微細加工装置及び方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173803U (enExample) * 1985-04-19 1986-10-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04111313A (ja) * 1990-08-31 1992-04-13 Mitsubishi Electric Corp 微細加工装置及び方法

Also Published As

Publication number Publication date
JPS574093B2 (enExample) 1982-01-25

Similar Documents

Publication Publication Date Title
JPS5376755A (en) Modulation method of plasma density
JPS54192A (en) Shielding wall of reactor container
JPS5229548A (en) Power generating method by which wave is availed
JPS5325366A (en) Plasma treating method and apparat us
JPS51125356A (en) Process for preparing 4-hydroxycyclopent -2-ene-1-one
JPS5239572A (en) Equipment for ultrasonic washing of resin
JPS5228621A (en) Full wave rectifier amplifier
JPS52134148A (en) High frequency heating apparatus
JPS5338692A (en) 7-amino-3-halo-3-cephem-4-carboxylic acids
JPS5213778A (en) Plasma-etching method
JPS526846A (en) Water turbine
JPS5211169A (en) Pure water producing apparatus
JPS52127167A (en) Etching method
JPS51119696A (en) Method for regeneration of the waste active carbon
JPS51122845A (en) High frequency heating system
JPS51145389A (en) Ultra sound wave senser
JPS5249504A (en) Method of constructing railway track
JPS5413672A (en) Ultrasonic wave washing apparatus
JPS5220997A (en) Coloring method of sodium percarbonate
JPS51114654A (en) Switching mode regulator
JPS5291284A (en) Method for operating apparatus which continuously conveys slurry
JPS52130679A (en) Generating apparatus for model signals of program sounds
JPS5413671A (en) Ultrasonic washing apparatus
JPS5211853A (en) Elastic surface wave oscillator unit
JPS5381007A (en) Signal control system