JPS5373609A - Oil feeding device for use in oil rotation vacuum pump - Google Patents

Oil feeding device for use in oil rotation vacuum pump

Info

Publication number
JPS5373609A
JPS5373609A JP14942676A JP14942676A JPS5373609A JP S5373609 A JPS5373609 A JP S5373609A JP 14942676 A JP14942676 A JP 14942676A JP 14942676 A JP14942676 A JP 14942676A JP S5373609 A JPS5373609 A JP S5373609A
Authority
JP
Japan
Prior art keywords
oil
vacuum pump
feeding device
rotation vacuum
oil feeding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14942676A
Other languages
English (en)
Other versions
JPS5648710B2 (ja
Inventor
Jiyunichi Aikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP14942676A priority Critical patent/JPS5373609A/ja
Publication of JPS5373609A publication Critical patent/JPS5373609A/ja
Publication of JPS5648710B2 publication Critical patent/JPS5648710B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Applications Or Details Of Rotary Compressors (AREA)
JP14942676A 1976-12-14 1976-12-14 Oil feeding device for use in oil rotation vacuum pump Granted JPS5373609A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14942676A JPS5373609A (en) 1976-12-14 1976-12-14 Oil feeding device for use in oil rotation vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14942676A JPS5373609A (en) 1976-12-14 1976-12-14 Oil feeding device for use in oil rotation vacuum pump

Publications (2)

Publication Number Publication Date
JPS5373609A true JPS5373609A (en) 1978-06-30
JPS5648710B2 JPS5648710B2 (ja) 1981-11-17

Family

ID=15474838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14942676A Granted JPS5373609A (en) 1976-12-14 1976-12-14 Oil feeding device for use in oil rotation vacuum pump

Country Status (1)

Country Link
JP (1) JPS5373609A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157785U (ja) * 1981-03-30 1982-10-04
JPS5835693U (ja) * 1981-08-31 1983-03-08 株式会社島津製作所 2段式油回転真空ポンプ
GB2564713B (en) * 2017-07-21 2020-04-01 Fen Tech Limited Driver Circuit

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177705A (ja) * 1987-01-17 1988-07-21 株式会社クボタ 作業車の昇降制御装置
JPS63177708A (ja) * 1987-01-19 1988-07-21 株式会社クボタ 作業車の昇降制御装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157785U (ja) * 1981-03-30 1982-10-04
JPS6325348Y2 (ja) * 1981-03-30 1988-07-11
JPS5835693U (ja) * 1981-08-31 1983-03-08 株式会社島津製作所 2段式油回転真空ポンプ
GB2564713B (en) * 2017-07-21 2020-04-01 Fen Tech Limited Driver Circuit

Also Published As

Publication number Publication date
JPS5648710B2 (ja) 1981-11-17

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