JPS5371567A - Reaction equipment - Google Patents

Reaction equipment

Info

Publication number
JPS5371567A
JPS5371567A JP14649676A JP14649676A JPS5371567A JP S5371567 A JPS5371567 A JP S5371567A JP 14649676 A JP14649676 A JP 14649676A JP 14649676 A JP14649676 A JP 14649676A JP S5371567 A JPS5371567 A JP S5371567A
Authority
JP
Japan
Prior art keywords
reaction equipment
reaction tube
tube
gas
leadin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14649676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6213812B2 (cg-RX-API-DMAC7.html
Inventor
Masakuni Akiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14649676A priority Critical patent/JPS5371567A/ja
Publication of JPS5371567A publication Critical patent/JPS5371567A/ja
Publication of JPS6213812B2 publication Critical patent/JPS6213812B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP14649676A 1976-12-08 1976-12-08 Reaction equipment Granted JPS5371567A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14649676A JPS5371567A (en) 1976-12-08 1976-12-08 Reaction equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14649676A JPS5371567A (en) 1976-12-08 1976-12-08 Reaction equipment

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP12600585A Division JPS6127624A (ja) 1985-06-12 1985-06-12 反応装置

Publications (2)

Publication Number Publication Date
JPS5371567A true JPS5371567A (en) 1978-06-26
JPS6213812B2 JPS6213812B2 (cg-RX-API-DMAC7.html) 1987-03-28

Family

ID=15408929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14649676A Granted JPS5371567A (en) 1976-12-08 1976-12-08 Reaction equipment

Country Status (1)

Country Link
JP (1) JPS5371567A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944821A (ja) * 1982-09-07 1984-03-13 Toshiba Corp 半導体熱処理容器
JPS6027690A (ja) * 1983-07-25 1985-02-12 Ulvac Corp 気相エピタキシヤル成長用化学反応装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944821A (ja) * 1982-09-07 1984-03-13 Toshiba Corp 半導体熱処理容器
JPS6027690A (ja) * 1983-07-25 1985-02-12 Ulvac Corp 気相エピタキシヤル成長用化学反応装置

Also Published As

Publication number Publication date
JPS6213812B2 (cg-RX-API-DMAC7.html) 1987-03-28

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