JPS536848Y2 - - Google Patents
Info
- Publication number
- JPS536848Y2 JPS536848Y2 JP9320473U JP9320473U JPS536848Y2 JP S536848 Y2 JPS536848 Y2 JP S536848Y2 JP 9320473 U JP9320473 U JP 9320473U JP 9320473 U JP9320473 U JP 9320473U JP S536848 Y2 JPS536848 Y2 JP S536848Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Drying Of Gases (AREA)
- Drying Of Solid Materials (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9320473U JPS536848Y2 (de) | 1973-08-04 | 1973-08-04 | |
| DE19742437195 DE2437195C3 (de) | 1973-08-04 | 1974-08-01 | Vorrichtung zum Trocknen eines komprimierten Gases |
| FR7427180A FR2239278A1 (en) | 1973-08-04 | 1974-08-05 | Compact compressed gas drier with pref. transparent housing - having coaxial heat exchangers and high-low temp. gas separator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9320473U JPS536848Y2 (de) | 1973-08-04 | 1973-08-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5039152U JPS5039152U (de) | 1975-04-22 |
| JPS536848Y2 true JPS536848Y2 (de) | 1978-02-21 |
Family
ID=14076027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9320473U Expired JPS536848Y2 (de) | 1973-08-04 | 1973-08-04 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS536848Y2 (de) |
| DE (1) | DE2437195C3 (de) |
| FR (1) | FR2239278A1 (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS607761Y2 (ja) * | 1977-08-05 | 1985-03-16 | 勝司 藤原 | 渦流管を備えた気液分離器 |
| US4848988A (en) * | 1988-02-02 | 1989-07-18 | Hisamoto Suzuki | Compressed air dehumidifier |
| DE4229177C1 (de) * | 1992-09-02 | 1994-04-21 | Testoterm Mestechnik Gmbh & Co | Gaskühler |
| DE19621908A1 (de) * | 1996-05-31 | 1997-12-04 | Filtan Gmbh | Verfahren und Vorrichtung zur Trocknung von Gas, insbesondere Erdgas |
| JP4786339B2 (ja) * | 2005-12-28 | 2011-10-05 | 東京エレクトロン株式会社 | 乾燥空気生成装置、基板処理システムおよび乾燥空気生成方法 |
-
1973
- 1973-08-04 JP JP9320473U patent/JPS536848Y2/ja not_active Expired
-
1974
- 1974-08-01 DE DE19742437195 patent/DE2437195C3/de not_active Expired
- 1974-08-05 FR FR7427180A patent/FR2239278A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2437195B2 (de) | 1978-11-02 |
| DE2437195C3 (de) | 1979-06-28 |
| JPS5039152U (de) | 1975-04-22 |
| DE2437195A1 (de) | 1975-02-27 |
| FR2239278A1 (en) | 1975-02-28 |
| FR2239278B1 (de) | 1976-12-31 |