JPS5367818A - Voice coil type linear motor - Google Patents

Voice coil type linear motor

Info

Publication number
JPS5367818A
JPS5367818A JP14364076A JP14364076A JPS5367818A JP S5367818 A JPS5367818 A JP S5367818A JP 14364076 A JP14364076 A JP 14364076A JP 14364076 A JP14364076 A JP 14364076A JP S5367818 A JPS5367818 A JP S5367818A
Authority
JP
Japan
Prior art keywords
voice coil
linear motor
coil type
type linear
make
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14364076A
Other languages
Japanese (ja)
Inventor
Hidehiko Munehiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14364076A priority Critical patent/JPS5367818A/en
Publication of JPS5367818A publication Critical patent/JPS5367818A/en
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating, Oscillating Or Vibrating Motors (AREA)

Abstract

PURPOSE: To make a deviation of an interlinked magnetic flux quantity due to a position of a coil small, and to make a driving force at a full motor stroke constant, by making a magnetic reluctance between a permanent magnet and a center pole larger according to come nearer to a front surface along with a center pole axial direction.
COPYRIGHT: (C)1978,JPO&Japio
JP14364076A 1976-11-29 1976-11-29 Voice coil type linear motor Pending JPS5367818A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14364076A JPS5367818A (en) 1976-11-29 1976-11-29 Voice coil type linear motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14364076A JPS5367818A (en) 1976-11-29 1976-11-29 Voice coil type linear motor

Publications (1)

Publication Number Publication Date
JPS5367818A true JPS5367818A (en) 1978-06-16

Family

ID=15343463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14364076A Pending JPS5367818A (en) 1976-11-29 1976-11-29 Voice coil type linear motor

Country Status (1)

Country Link
JP (1) JPS5367818A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019517762A (en) * 2016-06-09 2019-06-24 エーエスエムエル ネザーランズ ビー．ブイ． Lithographic apparatus and device manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019517762A (en) * 2016-06-09 2019-06-24 エーエスエムエル ネザーランズ ビー．ブイ． Lithographic apparatus and device manufacturing method
US10955759B2 (en) 2016-06-09 2021-03-23 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

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