JPS5367383A - Method of producing small ic implantation logic semiconductor - Google Patents

Method of producing small ic implantation logic semiconductor

Info

Publication number
JPS5367383A
JPS5367383A JP9425177A JP9425177A JPS5367383A JP S5367383 A JPS5367383 A JP S5367383A JP 9425177 A JP9425177 A JP 9425177A JP 9425177 A JP9425177 A JP 9425177A JP S5367383 A JPS5367383 A JP S5367383A
Authority
JP
Japan
Prior art keywords
producing small
logic semiconductor
implantation
implantation logic
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9425177A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5525505B2 (Direct
Inventor
Rinden Berii Robaato
Eru Perutsua Dagurasu
Jiee Piringu Deibuitsudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fairchild Semiconductor Corp
Original Assignee
Fairchild Camera and Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Camera and Instrument Corp filed Critical Fairchild Camera and Instrument Corp
Publication of JPS5367383A publication Critical patent/JPS5367383A/ja
Publication of JPS5525505B2 publication Critical patent/JPS5525505B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Integrated Circuits (AREA)
  • Logic Circuits (AREA)
  • Bipolar Transistors (AREA)
JP9425177A 1976-08-08 1977-08-08 Method of producing small ic implantation logic semiconductor Granted JPS5367383A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US70772876A 1976-08-08 1976-08-08

Publications (2)

Publication Number Publication Date
JPS5367383A true JPS5367383A (en) 1978-06-15
JPS5525505B2 JPS5525505B2 (Direct) 1980-07-07

Family

ID=24842920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9425177A Granted JPS5367383A (en) 1976-08-08 1977-08-08 Method of producing small ic implantation logic semiconductor

Country Status (1)

Country Link
JP (1) JPS5367383A (Direct)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017584A (Direct) * 1973-05-07 1975-02-24
JPS5140773A (en) * 1974-07-25 1976-04-05 Siemens Ag Handotaidebaisuno seizohoho
JPS5154379A (Direct) * 1974-10-29 1976-05-13 Fairchild Camera Instr Co

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017584A (Direct) * 1973-05-07 1975-02-24
JPS5140773A (en) * 1974-07-25 1976-04-05 Siemens Ag Handotaidebaisuno seizohoho
JPS5154379A (Direct) * 1974-10-29 1976-05-13 Fairchild Camera Instr Co

Also Published As

Publication number Publication date
JPS5525505B2 (Direct) 1980-07-07

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