JPS5365669A - Electron beam deflection circuit - Google Patents

Electron beam deflection circuit

Info

Publication number
JPS5365669A
JPS5365669A JP14163176A JP14163176A JPS5365669A JP S5365669 A JPS5365669 A JP S5365669A JP 14163176 A JP14163176 A JP 14163176A JP 14163176 A JP14163176 A JP 14163176A JP S5365669 A JPS5365669 A JP S5365669A
Authority
JP
Japan
Prior art keywords
electron beam
beam deflection
deflection circuit
voltage
lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14163176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5442588B2 (enExample
Inventor
Kuniyoshi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14163176A priority Critical patent/JPS5365669A/ja
Publication of JPS5365669A publication Critical patent/JPS5365669A/ja
Publication of JPS5442588B2 publication Critical patent/JPS5442588B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP14163176A 1976-11-25 1976-11-25 Electron beam deflection circuit Granted JPS5365669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14163176A JPS5365669A (en) 1976-11-25 1976-11-25 Electron beam deflection circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14163176A JPS5365669A (en) 1976-11-25 1976-11-25 Electron beam deflection circuit

Publications (2)

Publication Number Publication Date
JPS5365669A true JPS5365669A (en) 1978-06-12
JPS5442588B2 JPS5442588B2 (enExample) 1979-12-14

Family

ID=15296519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14163176A Granted JPS5365669A (en) 1976-11-25 1976-11-25 Electron beam deflection circuit

Country Status (1)

Country Link
JP (1) JPS5365669A (enExample)

Also Published As

Publication number Publication date
JPS5442588B2 (enExample) 1979-12-14

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