JPS5364636A - Dry etching device - Google Patents
Dry etching deviceInfo
- Publication number
- JPS5364636A JPS5364636A JP13955476A JP13955476A JPS5364636A JP S5364636 A JPS5364636 A JP S5364636A JP 13955476 A JP13955476 A JP 13955476A JP 13955476 A JP13955476 A JP 13955476A JP S5364636 A JPS5364636 A JP S5364636A
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- etching device
- dry
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13955476A JPS5364636A (en) | 1976-11-22 | 1976-11-22 | Dry etching device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13955476A JPS5364636A (en) | 1976-11-22 | 1976-11-22 | Dry etching device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5364636A true JPS5364636A (en) | 1978-06-09 |
JPS5428381B2 JPS5428381B2 (US07655746-20100202-C00011.png) | 1979-09-17 |
Family
ID=15247959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13955476A Granted JPS5364636A (en) | 1976-11-22 | 1976-11-22 | Dry etching device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5364636A (US07655746-20100202-C00011.png) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5625972A (en) * | 1979-08-09 | 1981-03-12 | Fujitsu Ltd | Etching treatment by plasma |
JPS57154147U (US07655746-20100202-C00011.png) * | 1981-03-20 | 1982-09-28 | ||
JPS57169241A (en) * | 1981-04-13 | 1982-10-18 | Oki Electric Ind Co Ltd | Dry etching method |
JPS58225638A (ja) * | 1982-06-24 | 1983-12-27 | Toshiba Corp | エッチング終点検出方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3032245C2 (de) * | 1980-08-27 | 1986-01-23 | VEGLA Vereinigte Glaswerke GmbH, 5100 Aachen | Heckscheibe für Kraftfahrzeuge |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51104268A (ja) * | 1975-03-12 | 1976-09-14 | Fujitsu Ltd | Etsuchingusochinoseigyohoho |
-
1976
- 1976-11-22 JP JP13955476A patent/JPS5364636A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51104268A (ja) * | 1975-03-12 | 1976-09-14 | Fujitsu Ltd | Etsuchingusochinoseigyohoho |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5625972A (en) * | 1979-08-09 | 1981-03-12 | Fujitsu Ltd | Etching treatment by plasma |
JPS5730907B2 (US07655746-20100202-C00011.png) * | 1979-08-09 | 1982-07-01 | ||
JPS57154147U (US07655746-20100202-C00011.png) * | 1981-03-20 | 1982-09-28 | ||
JPS57169241A (en) * | 1981-04-13 | 1982-10-18 | Oki Electric Ind Co Ltd | Dry etching method |
JPS58225638A (ja) * | 1982-06-24 | 1983-12-27 | Toshiba Corp | エッチング終点検出方法 |
JPH0454968B2 (US07655746-20100202-C00011.png) * | 1982-06-24 | 1992-09-01 | Tokyo Shibaura Electric Co |
Also Published As
Publication number | Publication date |
---|---|
JPS5428381B2 (US07655746-20100202-C00011.png) | 1979-09-17 |
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