JPS5362977A - Plane face pressure insulated electron gun - Google Patents
Plane face pressure insulated electron gunInfo
- Publication number
- JPS5362977A JPS5362977A JP13733676A JP13733676A JPS5362977A JP S5362977 A JPS5362977 A JP S5362977A JP 13733676 A JP13733676 A JP 13733676A JP 13733676 A JP13733676 A JP 13733676A JP S5362977 A JPS5362977 A JP S5362977A
- Authority
- JP
- Japan
- Prior art keywords
- electron gun
- face pressure
- plane face
- pressure insulated
- insulated electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009413 insulation Methods 0.000 abstract 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13733676A JPS5362977A (en) | 1976-11-17 | 1976-11-17 | Plane face pressure insulated electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13733676A JPS5362977A (en) | 1976-11-17 | 1976-11-17 | Plane face pressure insulated electron gun |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5362977A true JPS5362977A (en) | 1978-06-05 |
| JPS5756185B2 JPS5756185B2 (cs) | 1982-11-29 |
Family
ID=15196261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13733676A Granted JPS5362977A (en) | 1976-11-17 | 1976-11-17 | Plane face pressure insulated electron gun |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5362977A (cs) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5366151A (en) * | 1976-11-26 | 1978-06-13 | Hitachi Ltd | Electron gun unit of electron microscope and equivalent unit |
| JP2003504605A (ja) * | 1999-07-09 | 2003-02-04 | アドバンスト・エレクトロン・ビームズ・インコーポレーテッド | 電子ビーム加速器 |
| JP2006173033A (ja) * | 2004-12-20 | 2006-06-29 | Hitachi High-Technologies Corp | 電子銃 |
| WO2020003428A1 (ja) * | 2018-06-28 | 2020-01-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子線発生装置及び荷電粒子線装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50141259A (cs) * | 1974-04-18 | 1975-11-13 |
-
1976
- 1976-11-17 JP JP13733676A patent/JPS5362977A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50141259A (cs) * | 1974-04-18 | 1975-11-13 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5366151A (en) * | 1976-11-26 | 1978-06-13 | Hitachi Ltd | Electron gun unit of electron microscope and equivalent unit |
| JP2003504605A (ja) * | 1999-07-09 | 2003-02-04 | アドバンスト・エレクトロン・ビームズ・インコーポレーテッド | 電子ビーム加速器 |
| JP2006173033A (ja) * | 2004-12-20 | 2006-06-29 | Hitachi High-Technologies Corp | 電子銃 |
| WO2020003428A1 (ja) * | 2018-06-28 | 2020-01-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子線発生装置及び荷電粒子線装置 |
| US11139139B2 (en) | 2018-06-28 | 2021-10-05 | Hitaclii High-Tech Corporation | Charged particle beam generator and charged particle beam apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5756185B2 (cs) | 1982-11-29 |
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