JPS536284U - - Google Patents

Info

Publication number
JPS536284U
JPS536284U JP8581676U JP8581676U JPS536284U JP S536284 U JPS536284 U JP S536284U JP 8581676 U JP8581676 U JP 8581676U JP 8581676 U JP8581676 U JP 8581676U JP S536284 U JPS536284 U JP S536284U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8581676U
Other languages
Japanese (ja)
Other versions
JPS5415114Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8581676U priority Critical patent/JPS5415114Y2/ja
Publication of JPS536284U publication Critical patent/JPS536284U/ja
Application granted granted Critical
Publication of JPS5415114Y2 publication Critical patent/JPS5415114Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP8581676U 1976-07-01 1976-07-01 Expired JPS5415114Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8581676U JPS5415114Y2 (enrdf_load_stackoverflow) 1976-07-01 1976-07-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8581676U JPS5415114Y2 (enrdf_load_stackoverflow) 1976-07-01 1976-07-01

Publications (2)

Publication Number Publication Date
JPS536284U true JPS536284U (enrdf_load_stackoverflow) 1978-01-20
JPS5415114Y2 JPS5415114Y2 (enrdf_load_stackoverflow) 1979-06-19

Family

ID=28696716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8581676U Expired JPS5415114Y2 (enrdf_load_stackoverflow) 1976-07-01 1976-07-01

Country Status (1)

Country Link
JP (1) JPS5415114Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02190751A (ja) * 1989-01-20 1990-07-26 Shin Etsu Handotai Co Ltd 半導体ウエーハの表裏および方位判定検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02190751A (ja) * 1989-01-20 1990-07-26 Shin Etsu Handotai Co Ltd 半導体ウエーハの表裏および方位判定検査装置

Also Published As

Publication number Publication date
JPS5415114Y2 (enrdf_load_stackoverflow) 1979-06-19

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