JPS5362582U - - Google Patents
Info
- Publication number
- JPS5362582U JPS5362582U JP14349676U JP14349676U JPS5362582U JP S5362582 U JPS5362582 U JP S5362582U JP 14349676 U JP14349676 U JP 14349676U JP 14349676 U JP14349676 U JP 14349676U JP S5362582 U JPS5362582 U JP S5362582U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976143496U JPS6014003Y2 (en) | 1976-10-27 | 1976-10-27 | Cylinder with flow pressure control valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976143496U JPS6014003Y2 (en) | 1976-10-27 | 1976-10-27 | Cylinder with flow pressure control valve |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5362582U true JPS5362582U (en) | 1978-05-26 |
JPS6014003Y2 JPS6014003Y2 (en) | 1985-05-04 |
Family
ID=28752188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1976143496U Expired JPS6014003Y2 (en) | 1976-10-27 | 1976-10-27 | Cylinder with flow pressure control valve |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6014003Y2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60143205A (en) * | 1983-12-29 | 1985-07-29 | Koganei Seisakusho:Kk | Cylinder |
WO2019009106A1 (en) * | 2017-07-04 | 2019-01-10 | 株式会社フジキン | Actuator, valve, fluid supply system, and semiconductor production device |
WO2019009107A1 (en) * | 2017-07-04 | 2019-01-10 | 株式会社フジキン | Actuator, valve, and semiconductor production device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4329529Y1 (en) * | 1966-04-07 | 1968-12-04 | ||
JPS5015114U (en) * | 1973-06-04 | 1975-02-18 | ||
JPS5043672U (en) * | 1973-08-23 | 1975-05-02 |
-
1976
- 1976-10-27 JP JP1976143496U patent/JPS6014003Y2/en not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4329529Y1 (en) * | 1966-04-07 | 1968-12-04 | ||
JPS5015114U (en) * | 1973-06-04 | 1975-02-18 | ||
JPS5043672U (en) * | 1973-08-23 | 1975-05-02 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60143205A (en) * | 1983-12-29 | 1985-07-29 | Koganei Seisakusho:Kk | Cylinder |
WO2019009106A1 (en) * | 2017-07-04 | 2019-01-10 | 株式会社フジキン | Actuator, valve, fluid supply system, and semiconductor production device |
WO2019009107A1 (en) * | 2017-07-04 | 2019-01-10 | 株式会社フジキン | Actuator, valve, and semiconductor production device |
TWI679367B (en) * | 2017-07-04 | 2019-12-11 | 日商富士金股份有限公司 | Actuators, valves, and semiconductor manufacturing devices |
CN110730869A (en) * | 2017-07-04 | 2020-01-24 | 株式会社富士金 | Actuator, valve, fluid supply system, and semiconductor manufacturing apparatus |
CN110730870A (en) * | 2017-07-04 | 2020-01-24 | 株式会社富士金 | Actuator, valve, and semiconductor manufacturing apparatus |
KR20200014812A (en) * | 2017-07-04 | 2020-02-11 | 가부시키가이샤 후지킨 | Actuators, valves, fluid supply systems, and semiconductor manufacturing equipment |
JPWO2019009107A1 (en) * | 2017-07-04 | 2020-04-30 | 株式会社フジキン | Actuators, valves, and semiconductor manufacturing equipment |
JPWO2019009106A1 (en) * | 2017-07-04 | 2020-04-30 | 株式会社フジキン | Actuators, valves, fluid supply systems, and semiconductor manufacturing equipment |
US11047503B2 (en) | 2017-07-04 | 2021-06-29 | Fujikin Incorporation | Actuator, valve device, and fluid supply system |
CN110730870B (en) * | 2017-07-04 | 2021-07-30 | 株式会社富士金 | Actuator, valve, and semiconductor manufacturing apparatus |
US11261990B2 (en) | 2017-07-04 | 2022-03-01 | Fujikin Incorporated | Actuator and valve device |
Also Published As
Publication number | Publication date |
---|---|
JPS6014003Y2 (en) | 1985-05-04 |