JPS5361573A - Method of extracting thermodecomposable foreign deposits from piece member - Google Patents

Method of extracting thermodecomposable foreign deposits from piece member

Info

Publication number
JPS5361573A
JPS5361573A JP13618276A JP13618276A JPS5361573A JP S5361573 A JPS5361573 A JP S5361573A JP 13618276 A JP13618276 A JP 13618276A JP 13618276 A JP13618276 A JP 13618276A JP S5361573 A JPS5361573 A JP S5361573A
Authority
JP
Japan
Prior art keywords
thermodecomposable
extracting
piece member
foreign deposits
deposits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13618276A
Other languages
Japanese (ja)
Inventor
Sutafuin Robaato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Procedyne Corp
Original Assignee
Procedyne Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Procedyne Corp filed Critical Procedyne Corp
Priority to JP13618276A priority Critical patent/JPS5361573A/en
Publication of JPS5361573A publication Critical patent/JPS5361573A/en
Pending legal-status Critical Current

Links

Landscapes

  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Cleaning In General (AREA)
JP13618276A 1976-11-12 1976-11-12 Method of extracting thermodecomposable foreign deposits from piece member Pending JPS5361573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13618276A JPS5361573A (en) 1976-11-12 1976-11-12 Method of extracting thermodecomposable foreign deposits from piece member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13618276A JPS5361573A (en) 1976-11-12 1976-11-12 Method of extracting thermodecomposable foreign deposits from piece member

Publications (1)

Publication Number Publication Date
JPS5361573A true JPS5361573A (en) 1978-06-02

Family

ID=15169249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13618276A Pending JPS5361573A (en) 1976-11-12 1976-11-12 Method of extracting thermodecomposable foreign deposits from piece member

Country Status (1)

Country Link
JP (1) JPS5361573A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04354350A (en) * 1991-05-31 1992-12-08 Shin Etsu Handotai Co Ltd Wafer transfer device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04354350A (en) * 1991-05-31 1992-12-08 Shin Etsu Handotai Co Ltd Wafer transfer device

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