JPS5358760A - Heat treatment apparatus - Google Patents

Heat treatment apparatus

Info

Publication number
JPS5358760A
JPS5358760A JP13442976A JP13442976A JPS5358760A JP S5358760 A JPS5358760 A JP S5358760A JP 13442976 A JP13442976 A JP 13442976A JP 13442976 A JP13442976 A JP 13442976A JP S5358760 A JPS5358760 A JP S5358760A
Authority
JP
Japan
Prior art keywords
heat treatment
treatment apparatus
plates
tuve
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13442976A
Other languages
Japanese (ja)
Inventor
Eizo Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13442976A priority Critical patent/JPS5358760A/en
Publication of JPS5358760A publication Critical patent/JPS5358760A/en
Pending legal-status Critical Current

Links

Landscapes

  • Tunnel Furnaces (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)

Abstract

PURPOSE: To prevent the dust produced as a result of friction between thin plate holder and the inside wall of a furnace core tuve from depositing on thin plates and increase the manufacturing yield by providing first and second separating plates in a heat treatment apparatus.
COPYRIGHT: (C)1978,JPO&Japio
JP13442976A 1976-11-08 1976-11-08 Heat treatment apparatus Pending JPS5358760A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13442976A JPS5358760A (en) 1976-11-08 1976-11-08 Heat treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13442976A JPS5358760A (en) 1976-11-08 1976-11-08 Heat treatment apparatus

Publications (1)

Publication Number Publication Date
JPS5358760A true JPS5358760A (en) 1978-05-26

Family

ID=15128162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13442976A Pending JPS5358760A (en) 1976-11-08 1976-11-08 Heat treatment apparatus

Country Status (1)

Country Link
JP (1) JPS5358760A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0047112A2 (en) * 1980-08-29 1982-03-10 Fujitsu Limited Method of forming phosphosilicate glass films

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0047112A2 (en) * 1980-08-29 1982-03-10 Fujitsu Limited Method of forming phosphosilicate glass films
US4513026A (en) * 1980-08-29 1985-04-23 Fujitsu Limited Method for coating a semiconductor device with a phosphosilicate glass

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