JPS5358760A - Heat treatment apparatus - Google Patents
Heat treatment apparatusInfo
- Publication number
- JPS5358760A JPS5358760A JP13442976A JP13442976A JPS5358760A JP S5358760 A JPS5358760 A JP S5358760A JP 13442976 A JP13442976 A JP 13442976A JP 13442976 A JP13442976 A JP 13442976A JP S5358760 A JPS5358760 A JP S5358760A
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment apparatus
- plates
- tuve
- depositing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Tunnel Furnaces (AREA)
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
Abstract
PURPOSE: To prevent the dust produced as a result of friction between thin plate holder and the inside wall of a furnace core tuve from depositing on thin plates and increase the manufacturing yield by providing first and second separating plates in a heat treatment apparatus.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13442976A JPS5358760A (en) | 1976-11-08 | 1976-11-08 | Heat treatment apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13442976A JPS5358760A (en) | 1976-11-08 | 1976-11-08 | Heat treatment apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5358760A true JPS5358760A (en) | 1978-05-26 |
Family
ID=15128162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13442976A Pending JPS5358760A (en) | 1976-11-08 | 1976-11-08 | Heat treatment apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5358760A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0047112A2 (en) * | 1980-08-29 | 1982-03-10 | Fujitsu Limited | Method of forming phosphosilicate glass films |
-
1976
- 1976-11-08 JP JP13442976A patent/JPS5358760A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0047112A2 (en) * | 1980-08-29 | 1982-03-10 | Fujitsu Limited | Method of forming phosphosilicate glass films |
US4513026A (en) * | 1980-08-29 | 1985-04-23 | Fujitsu Limited | Method for coating a semiconductor device with a phosphosilicate glass |
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