JPS535871B2 - - Google Patents

Info

Publication number
JPS535871B2
JPS535871B2 JP13516273A JP13516273A JPS535871B2 JP S535871 B2 JPS535871 B2 JP S535871B2 JP 13516273 A JP13516273 A JP 13516273A JP 13516273 A JP13516273 A JP 13516273A JP S535871 B2 JPS535871 B2 JP S535871B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13516273A
Other languages
Japanese (ja)
Other versions
JPS5084472A (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13516273A priority Critical patent/JPS535871B2/ja
Publication of JPS5084472A publication Critical patent/JPS5084472A/ja
Publication of JPS535871B2 publication Critical patent/JPS535871B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13516273A 1973-11-30 1973-11-30 Expired JPS535871B2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13516273A JPS535871B2 (enrdf_load_html_response) 1973-11-30 1973-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13516273A JPS535871B2 (enrdf_load_html_response) 1973-11-30 1973-11-30

Publications (2)

Publication Number Publication Date
JPS5084472A JPS5084472A (enrdf_load_html_response) 1975-07-08
JPS535871B2 true JPS535871B2 (enrdf_load_html_response) 1978-03-02

Family

ID=15145260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13516273A Expired JPS535871B2 (enrdf_load_html_response) 1973-11-30 1973-11-30

Country Status (1)

Country Link
JP (1) JPS535871B2 (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227076A (en) * 1975-08-27 1977-03-01 Seiko Instr & Electronics Ltd Equipment for ionic plating
JPS54100988A (en) * 1978-01-27 1979-08-09 Agency Of Ind Science & Technol Ion plating device
US4974544A (en) * 1986-10-07 1990-12-04 Ricoh Company, Co. Vapor deposition apparatus
JPS63109162A (ja) * 1986-10-24 1988-05-13 Res Dev Corp Of Japan イオンプレ−テイング方法とその装置

Also Published As

Publication number Publication date
JPS5084472A (enrdf_load_html_response) 1975-07-08

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