JPS535831B2 - - Google Patents
Info
- Publication number
- JPS535831B2 JPS535831B2 JP1807372A JP1807372A JPS535831B2 JP S535831 B2 JPS535831 B2 JP S535831B2 JP 1807372 A JP1807372 A JP 1807372A JP 1807372 A JP1807372 A JP 1807372A JP S535831 B2 JPS535831 B2 JP S535831B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1807372A JPS535831B2 (ja) | 1972-02-23 | 1972-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1807372A JPS535831B2 (ja) | 1972-02-23 | 1972-02-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4888990A JPS4888990A (ja) | 1973-11-21 |
| JPS535831B2 true JPS535831B2 (ja) | 1978-03-02 |
Family
ID=11961474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1807372A Expired JPS535831B2 (ja) | 1972-02-23 | 1972-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS535831B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6345637Y2 (ja) * | 1980-07-23 | 1988-11-28 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107438891B (zh) * | 2015-02-10 | 2019-11-08 | 诺威量测设备公司 | 用于使用二次离子质谱的半导体计量和表面分析的系统和方法 |
-
1972
- 1972-02-23 JP JP1807372A patent/JPS535831B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6345637Y2 (ja) * | 1980-07-23 | 1988-11-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4888990A (ja) | 1973-11-21 |