JPS5357856A - Measuring apparatus for photoelectric conversion system pattern size - Google Patents

Measuring apparatus for photoelectric conversion system pattern size

Info

Publication number
JPS5357856A
JPS5357856A JP13265576A JP13265576A JPS5357856A JP S5357856 A JPS5357856 A JP S5357856A JP 13265576 A JP13265576 A JP 13265576A JP 13265576 A JP13265576 A JP 13265576A JP S5357856 A JPS5357856 A JP S5357856A
Authority
JP
Japan
Prior art keywords
photoelectric conversion
measuring apparatus
conversion system
pattern size
system pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13265576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5717243B2 (enExample
Inventor
Shogo Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13265576A priority Critical patent/JPS5357856A/ja
Publication of JPS5357856A publication Critical patent/JPS5357856A/ja
Publication of JPS5717243B2 publication Critical patent/JPS5717243B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP13265576A 1976-11-04 1976-11-04 Measuring apparatus for photoelectric conversion system pattern size Granted JPS5357856A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13265576A JPS5357856A (en) 1976-11-04 1976-11-04 Measuring apparatus for photoelectric conversion system pattern size

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13265576A JPS5357856A (en) 1976-11-04 1976-11-04 Measuring apparatus for photoelectric conversion system pattern size

Publications (2)

Publication Number Publication Date
JPS5357856A true JPS5357856A (en) 1978-05-25
JPS5717243B2 JPS5717243B2 (enExample) 1982-04-09

Family

ID=15086391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13265576A Granted JPS5357856A (en) 1976-11-04 1976-11-04 Measuring apparatus for photoelectric conversion system pattern size

Country Status (1)

Country Link
JP (1) JPS5357856A (enExample)

Also Published As

Publication number Publication date
JPS5717243B2 (enExample) 1982-04-09

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