JPS5354690U - - Google Patents
Info
- Publication number
- JPS5354690U JPS5354690U JP13662076U JP13662076U JPS5354690U JP S5354690 U JPS5354690 U JP S5354690U JP 13662076 U JP13662076 U JP 13662076U JP 13662076 U JP13662076 U JP 13662076U JP S5354690 U JPS5354690 U JP S5354690U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13662076U JPS5354690U (bs) | 1976-10-13 | 1976-10-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13662076U JPS5354690U (bs) | 1976-10-13 | 1976-10-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5354690U true JPS5354690U (bs) | 1978-05-10 |
Family
ID=28745483
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13662076U Pending JPS5354690U (bs) | 1976-10-13 | 1976-10-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5354690U (bs) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017208374A (ja) * | 2016-05-16 | 2017-11-24 | 東京エレクトロン株式会社 | 載置台システム、基板処理装置及び温度制御方法 |
JP2019039707A (ja) * | 2017-08-23 | 2019-03-14 | 住友金属鉱山株式会社 | 温度測定センサフィルム及びその製造方法並びに該温度測定センサフィルムを用いた長尺基板の温度測定方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4843682B1 (bs) * | 1964-06-09 | 1973-12-20 |
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1976
- 1976-10-13 JP JP13662076U patent/JPS5354690U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4843682B1 (bs) * | 1964-06-09 | 1973-12-20 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017208374A (ja) * | 2016-05-16 | 2017-11-24 | 東京エレクトロン株式会社 | 載置台システム、基板処理装置及び温度制御方法 |
JP2019039707A (ja) * | 2017-08-23 | 2019-03-14 | 住友金属鉱山株式会社 | 温度測定センサフィルム及びその製造方法並びに該温度測定センサフィルムを用いた長尺基板の温度測定方法 |