JPS5353407A - Ultra violet ray irradiating apparatus - Google Patents

Ultra violet ray irradiating apparatus

Info

Publication number
JPS5353407A
JPS5353407A JP12736776A JP12736776A JPS5353407A JP S5353407 A JPS5353407 A JP S5353407A JP 12736776 A JP12736776 A JP 12736776A JP 12736776 A JP12736776 A JP 12736776A JP S5353407 A JPS5353407 A JP S5353407A
Authority
JP
Japan
Prior art keywords
ultra violet
ray irradiating
irradiating apparatus
violet ray
ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12736776A
Other languages
Japanese (ja)
Inventor
Tatsuo Shigeta
Yoshinori Katsube
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP12736776A priority Critical patent/JPS5353407A/en
Publication of JPS5353407A publication Critical patent/JPS5353407A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP12736776A 1976-10-25 1976-10-25 Ultra violet ray irradiating apparatus Pending JPS5353407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12736776A JPS5353407A (en) 1976-10-25 1976-10-25 Ultra violet ray irradiating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12736776A JPS5353407A (en) 1976-10-25 1976-10-25 Ultra violet ray irradiating apparatus

Publications (1)

Publication Number Publication Date
JPS5353407A true JPS5353407A (en) 1978-05-15

Family

ID=14958201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12736776A Pending JPS5353407A (en) 1976-10-25 1976-10-25 Ultra violet ray irradiating apparatus

Country Status (1)

Country Link
JP (1) JPS5353407A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63197566A (en) * 1986-10-31 1988-08-16 ヨセフ　トマス　バギオ，ジュニア Curing device for photosensitive coating layer and curing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63197566A (en) * 1986-10-31 1988-08-16 ヨセフ　トマス　バギオ，ジュニア Curing device for photosensitive coating layer and curing method thereof

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