JPS535279B2 - - Google Patents
Info
- Publication number
- JPS535279B2 JPS535279B2 JP6382871A JP6382871A JPS535279B2 JP S535279 B2 JPS535279 B2 JP S535279B2 JP 6382871 A JP6382871 A JP 6382871A JP 6382871 A JP6382871 A JP 6382871A JP S535279 B2 JPS535279 B2 JP S535279B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6382871A JPS535279B2 (en) | 1971-08-20 | 1971-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6382871A JPS535279B2 (en) | 1971-08-20 | 1971-08-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4829699A JPS4829699A (en) | 1973-04-19 |
| JPS535279B2 true JPS535279B2 (en) | 1978-02-25 |
Family
ID=13240596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6382871A Expired JPS535279B2 (en) | 1971-08-20 | 1971-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS535279B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220087532A (en) | 2019-11-05 | 2022-06-24 | 도쿄엘렉트론가부시키가이샤 | An apparatus for processing a substrate, a raw material cartridge, a method for processing a substrate, and a method for manufacturing the raw material cartridge |
| KR20220091546A (en) | 2019-11-05 | 2022-06-30 | 도쿄엘렉트론가부시키가이샤 | Apparatus for treating a substrate, an apparatus for concentrating a process gas, and a method for treating a substrate |
-
1971
- 1971-08-20 JP JP6382871A patent/JPS535279B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220087532A (en) | 2019-11-05 | 2022-06-24 | 도쿄엘렉트론가부시키가이샤 | An apparatus for processing a substrate, a raw material cartridge, a method for processing a substrate, and a method for manufacturing the raw material cartridge |
| KR20220091546A (en) | 2019-11-05 | 2022-06-30 | 도쿄엘렉트론가부시키가이샤 | Apparatus for treating a substrate, an apparatus for concentrating a process gas, and a method for treating a substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4829699A (en) | 1973-04-19 |