JPS4829699A - - Google Patents
Info
- Publication number
- JPS4829699A JPS4829699A JP6382871A JP6382871A JPS4829699A JP S4829699 A JPS4829699 A JP S4829699A JP 6382871 A JP6382871 A JP 6382871A JP 6382871 A JP6382871 A JP 6382871A JP S4829699 A JPS4829699 A JP S4829699A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6382871A JPS535279B2 (en) | 1971-08-20 | 1971-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6382871A JPS535279B2 (en) | 1971-08-20 | 1971-08-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4829699A true JPS4829699A (en) | 1973-04-19 |
| JPS535279B2 JPS535279B2 (en) | 1978-02-25 |
Family
ID=13240596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6382871A Expired JPS535279B2 (en) | 1971-08-20 | 1971-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS535279B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021075739A (en) | 2019-11-05 | 2021-05-20 | 東京エレクトロン株式会社 | Apparatus for processing substrate, apparatus for thickening process gas, and method for processing substrate |
| JP7447432B2 (en) | 2019-11-05 | 2024-03-12 | 東京エレクトロン株式会社 | Apparatus for processing a substrate, raw material cartridge, method for processing a substrate, and method for manufacturing a raw material cartridge |
-
1971
- 1971-08-20 JP JP6382871A patent/JPS535279B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS535279B2 (en) | 1978-02-25 |