JPS5352381U - - Google Patents
Info
- Publication number
- JPS5352381U JPS5352381U JP13485176U JP13485176U JPS5352381U JP S5352381 U JPS5352381 U JP S5352381U JP 13485176 U JP13485176 U JP 13485176U JP 13485176 U JP13485176 U JP 13485176U JP S5352381 U JPS5352381 U JP S5352381U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Connections Arranged To Contact A Plurality Of Conductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13485176U JPS5352381U (ja) | 1976-10-08 | 1976-10-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13485176U JPS5352381U (ja) | 1976-10-08 | 1976-10-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5352381U true JPS5352381U (ja) | 1978-05-04 |
Family
ID=28743770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13485176U Pending JPS5352381U (ja) | 1976-10-08 | 1976-10-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5352381U (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59151419A (ja) * | 1983-02-18 | 1984-08-29 | Hitachi Electronics Eng Co Ltd | 反応処理装置 |
JPS60103827U (ja) * | 1983-12-21 | 1985-07-15 | 関西日本電気株式会社 | 半導体製造装置 |
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1976
- 1976-10-08 JP JP13485176U patent/JPS5352381U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59151419A (ja) * | 1983-02-18 | 1984-08-29 | Hitachi Electronics Eng Co Ltd | 反応処理装置 |
JPS60103827U (ja) * | 1983-12-21 | 1985-07-15 | 関西日本電気株式会社 | 半導体製造装置 |