JPS5352138A - Distortion corrector of microscope - Google Patents

Distortion corrector of microscope

Info

Publication number
JPS5352138A
JPS5352138A JP12611876A JP12611876A JPS5352138A JP S5352138 A JPS5352138 A JP S5352138A JP 12611876 A JP12611876 A JP 12611876A JP 12611876 A JP12611876 A JP 12611876A JP S5352138 A JPS5352138 A JP S5352138A
Authority
JP
Japan
Prior art keywords
microscope
distortion corrector
distortion
corrector
correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12611876A
Other languages
Japanese (ja)
Inventor
Shunichiro Fujioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12611876A priority Critical patent/JPS5352138A/en
Publication of JPS5352138A publication Critical patent/JPS5352138A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To perform the correction of distortion a microscopic image by using a distortion-correcting lens which undergoes position and inclination control.
JP12611876A 1976-10-22 1976-10-22 Distortion corrector of microscope Pending JPS5352138A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12611876A JPS5352138A (en) 1976-10-22 1976-10-22 Distortion corrector of microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12611876A JPS5352138A (en) 1976-10-22 1976-10-22 Distortion corrector of microscope

Publications (1)

Publication Number Publication Date
JPS5352138A true JPS5352138A (en) 1978-05-12

Family

ID=14927074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12611876A Pending JPS5352138A (en) 1976-10-22 1976-10-22 Distortion corrector of microscope

Country Status (1)

Country Link
JP (1) JPS5352138A (en)

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