JPS5352103Y2 - - Google Patents
Info
- Publication number
- JPS5352103Y2 JPS5352103Y2 JP1973044498U JP4449873U JPS5352103Y2 JP S5352103 Y2 JPS5352103 Y2 JP S5352103Y2 JP 1973044498 U JP1973044498 U JP 1973044498U JP 4449873 U JP4449873 U JP 4449873U JP S5352103 Y2 JPS5352103 Y2 JP S5352103Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1973044498U JPS5352103Y2 (en) | 1973-04-12 | 1973-04-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1973044498U JPS5352103Y2 (en) | 1973-04-12 | 1973-04-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS49146542U JPS49146542U (en) | 1974-12-18 |
JPS5352103Y2 true JPS5352103Y2 (en) | 1978-12-13 |
Family
ID=28177506
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1973044498U Expired JPS5352103Y2 (en) | 1973-04-12 | 1973-04-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5352103Y2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220066942A (en) | 2019-10-04 | 2022-05-24 | 도쿄엘렉트론가부시키가이샤 | Annealing device and heating cooling method |
KR20220106791A (en) | 2019-11-26 | 2022-07-29 | 도쿄엘렉트론가부시키가이샤 | Substrate processing apparatus and substrate processing method |
-
1973
- 1973-04-12 JP JP1973044498U patent/JPS5352103Y2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220066942A (en) | 2019-10-04 | 2022-05-24 | 도쿄엘렉트론가부시키가이샤 | Annealing device and heating cooling method |
KR20220106791A (en) | 2019-11-26 | 2022-07-29 | 도쿄엘렉트론가부시키가이샤 | Substrate processing apparatus and substrate processing method |
Also Published As
Publication number | Publication date |
---|---|
JPS49146542U (en) | 1974-12-18 |