JPS5349661Y2 - - Google Patents

Info

Publication number
JPS5349661Y2
JPS5349661Y2 JP1975014788U JP1478875U JPS5349661Y2 JP S5349661 Y2 JPS5349661 Y2 JP S5349661Y2 JP 1975014788 U JP1975014788 U JP 1975014788U JP 1478875 U JP1478875 U JP 1478875U JP S5349661 Y2 JPS5349661 Y2 JP S5349661Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975014788U
Other languages
Japanese (ja)
Other versions
JPS5196494U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975014788U priority Critical patent/JPS5349661Y2/ja
Publication of JPS5196494U publication Critical patent/JPS5196494U/ja
Application granted granted Critical
Publication of JPS5349661Y2 publication Critical patent/JPS5349661Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1975014788U 1975-01-31 1975-01-31 Expired JPS5349661Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975014788U JPS5349661Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-01-31 1975-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975014788U JPS5349661Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-01-31 1975-01-31

Publications (2)

Publication Number Publication Date
JPS5196494U JPS5196494U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-08-03
JPS5349661Y2 true JPS5349661Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-11-29

Family

ID=28094135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975014788U Expired JPS5349661Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-01-31 1975-01-31

Country Status (1)

Country Link
JP (1) JPS5349661Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754210Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-12-29 1982-11-24
GB8607222D0 (en) * 1986-03-24 1986-04-30 Welding Inst Charged particle collection
JP2013120650A (ja) * 2011-12-06 2013-06-17 Hitachi High-Technologies Corp 走査電子顕微鏡および二次電子検出方法
JP6759021B2 (ja) * 2016-09-09 2020-09-23 日本電子株式会社 電子検出装置及び電子顕微鏡装置
JP2022185769A (ja) 2021-06-03 2022-12-15 日本電子株式会社 走査型電子顕微鏡、及び、走査型電子顕微鏡を用いた画像生成方法

Also Published As

Publication number Publication date
JPS5196494U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-08-03

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