JPS534768Y2 - - Google Patents

Info

Publication number
JPS534768Y2
JPS534768Y2 JP9623673U JP9623673U JPS534768Y2 JP S534768 Y2 JPS534768 Y2 JP S534768Y2 JP 9623673 U JP9623673 U JP 9623673U JP 9623673 U JP9623673 U JP 9623673U JP S534768 Y2 JPS534768 Y2 JP S534768Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9623673U
Other languages
Japanese (ja)
Other versions
JPS5042652U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9623673U priority Critical patent/JPS534768Y2/ja
Publication of JPS5042652U publication Critical patent/JPS5042652U/ja
Application granted granted Critical
Publication of JPS534768Y2 publication Critical patent/JPS534768Y2/ja
Expired legal-status Critical Current

Links

JP9623673U 1973-08-16 1973-08-16 Expired JPS534768Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9623673U JPS534768Y2 (enExample) 1973-08-16 1973-08-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9623673U JPS534768Y2 (enExample) 1973-08-16 1973-08-16

Publications (2)

Publication Number Publication Date
JPS5042652U JPS5042652U (enExample) 1975-04-30
JPS534768Y2 true JPS534768Y2 (enExample) 1978-02-06

Family

ID=28293718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9623673U Expired JPS534768Y2 (enExample) 1973-08-16 1973-08-16

Country Status (1)

Country Link
JP (1) JPS534768Y2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6166353A (ja) * 1984-09-07 1986-04-05 Jeol Ltd 走査像の補正方法
JP2561090Y2 (ja) * 1991-03-22 1998-01-28 三菱電機株式会社 電子機器のモジュール引き抜き工具
JP5216307B2 (ja) * 2007-11-19 2013-06-19 株式会社日立ハイテクノロジーズ 半導体外観検査装置および検査方法

Also Published As

Publication number Publication date
JPS5042652U (enExample) 1975-04-30

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