JPS5347662U - - Google Patents
Info
- Publication number
- JPS5347662U JPS5347662U JP14263677U JP14263677U JPS5347662U JP S5347662 U JPS5347662 U JP S5347662U JP 14263677 U JP14263677 U JP 14263677U JP 14263677 U JP14263677 U JP 14263677U JP S5347662 U JPS5347662 U JP S5347662U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14263677U JPS5347662U (en) | 1977-10-24 | 1977-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14263677U JPS5347662U (en) | 1977-10-24 | 1977-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5347662U true JPS5347662U (en) | 1978-04-22 |
Family
ID=28751378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14263677U Pending JPS5347662U (en) | 1977-10-24 | 1977-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5347662U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52142637A (en) * | 1976-05-25 | 1977-11-28 | Nippon Telegraph & Telephone | Plasma etching device |
-
1977
- 1977-10-24 JP JP14263677U patent/JPS5347662U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52142637A (en) * | 1976-05-25 | 1977-11-28 | Nippon Telegraph & Telephone | Plasma etching device |