JPS5347161B2 - - Google Patents
Info
- Publication number
- JPS5347161B2 JPS5347161B2 JP6227176A JP6227176A JPS5347161B2 JP S5347161 B2 JPS5347161 B2 JP S5347161B2 JP 6227176 A JP6227176 A JP 6227176A JP 6227176 A JP6227176 A JP 6227176A JP S5347161 B2 JPS5347161 B2 JP S5347161B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6227176A JPS52146217A (en) | 1976-05-31 | 1976-05-31 | Positive type radiation sensitive material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6227176A JPS52146217A (en) | 1976-05-31 | 1976-05-31 | Positive type radiation sensitive material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52146217A JPS52146217A (en) | 1977-12-05 |
| JPS5347161B2 true JPS5347161B2 (en:Method) | 1978-12-19 |
Family
ID=13195308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6227176A Granted JPS52146217A (en) | 1976-05-31 | 1976-05-31 | Positive type radiation sensitive material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52146217A (en:Method) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5517112A (en) * | 1978-07-21 | 1980-02-06 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Positive type radiation sensitive composition |
| JPS6129839A (ja) * | 1984-07-23 | 1986-02-10 | Nippon Telegr & Teleph Corp <Ntt> | ポジ形レジスト組成物 |
| US4699870A (en) * | 1984-07-23 | 1987-10-13 | Nippon Telegraph And Telephone Corporation | Patterning method |
| JPH0675194B2 (ja) * | 1986-03-31 | 1994-09-21 | キヤノン株式会社 | 重合性薄膜 |
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1976
- 1976-05-31 JP JP6227176A patent/JPS52146217A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52146217A (en) | 1977-12-05 |