JPS5346696B2 - - Google Patents
Info
- Publication number
- JPS5346696B2 JPS5346696B2 JP12893276A JP12893276A JPS5346696B2 JP S5346696 B2 JPS5346696 B2 JP S5346696B2 JP 12893276 A JP12893276 A JP 12893276A JP 12893276 A JP12893276 A JP 12893276A JP S5346696 B2 JPS5346696 B2 JP S5346696B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12893276A JPS5353977A (en) | 1976-10-27 | 1976-10-27 | Electron beam exposure device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12893276A JPS5353977A (en) | 1976-10-27 | 1976-10-27 | Electron beam exposure device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5353977A JPS5353977A (en) | 1978-05-16 |
| JPS5346696B2 true JPS5346696B2 (fr) | 1978-12-15 |
Family
ID=14996954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12893276A Granted JPS5353977A (en) | 1976-10-27 | 1976-10-27 | Electron beam exposure device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5353977A (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS586129A (ja) * | 1981-07-03 | 1983-01-13 | Fujitsu Ltd | 電子ビ−ム露光装置 |
| US5530519A (en) * | 1992-06-30 | 1996-06-25 | Noritsu Koki Co., Ltd. | Method and apparatus for processing control strip |
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1976
- 1976-10-27 JP JP12893276A patent/JPS5353977A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5353977A (en) | 1978-05-16 |