JPS5346289Y2 - - Google Patents

Info

Publication number
JPS5346289Y2
JPS5346289Y2 JP3900074U JP3900074U JPS5346289Y2 JP S5346289 Y2 JPS5346289 Y2 JP S5346289Y2 JP 3900074 U JP3900074 U JP 3900074U JP 3900074 U JP3900074 U JP 3900074U JP S5346289 Y2 JPS5346289 Y2 JP S5346289Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3900074U
Other languages
Japanese (ja)
Other versions
JPS50128333U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3900074U priority Critical patent/JPS5346289Y2/ja
Publication of JPS50128333U publication Critical patent/JPS50128333U/ja
Application granted granted Critical
Publication of JPS5346289Y2 publication Critical patent/JPS5346289Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3900074U 1974-04-05 1974-04-05 Expired JPS5346289Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3900074U JPS5346289Y2 (enrdf_load_stackoverflow) 1974-04-05 1974-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3900074U JPS5346289Y2 (enrdf_load_stackoverflow) 1974-04-05 1974-04-05

Publications (2)

Publication Number Publication Date
JPS50128333U JPS50128333U (enrdf_load_stackoverflow) 1975-10-21
JPS5346289Y2 true JPS5346289Y2 (enrdf_load_stackoverflow) 1978-11-06

Family

ID=28162020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3900074U Expired JPS5346289Y2 (enrdf_load_stackoverflow) 1974-04-05 1974-04-05

Country Status (1)

Country Link
JP (1) JPS5346289Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52108380A (en) * 1976-03-10 1977-09-10 Koito Mfg Co Ltd Gassintroducing system for ionic plating apparatus of high frequency energization type

Also Published As

Publication number Publication date
JPS50128333U (enrdf_load_stackoverflow) 1975-10-21

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