JPS52108380A - Gassintroducing system for ionic plating apparatus of high frequency energization type - Google Patents
Gassintroducing system for ionic plating apparatus of high frequency energization typeInfo
- Publication number
- JPS52108380A JPS52108380A JP2505676A JP2505676A JPS52108380A JP S52108380 A JPS52108380 A JP S52108380A JP 2505676 A JP2505676 A JP 2505676A JP 2505676 A JP2505676 A JP 2505676A JP S52108380 A JPS52108380 A JP S52108380A
- Authority
- JP
- Japan
- Prior art keywords
- gassintroducing
- high frequency
- plating apparatus
- frequency energization
- energization type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2505676A JPS52108380A (en) | 1976-03-10 | 1976-03-10 | Gassintroducing system for ionic plating apparatus of high frequency energization type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2505676A JPS52108380A (en) | 1976-03-10 | 1976-03-10 | Gassintroducing system for ionic plating apparatus of high frequency energization type |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52108380A true JPS52108380A (en) | 1977-09-10 |
JPS5527623B2 JPS5527623B2 (en) | 1980-07-22 |
Family
ID=12155255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2505676A Granted JPS52108380A (en) | 1976-03-10 | 1976-03-10 | Gassintroducing system for ionic plating apparatus of high frequency energization type |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52108380A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0544261Y2 (en) * | 1989-09-16 | 1993-11-10 | ||
JPH11269643A (en) * | 1998-03-20 | 1999-10-05 | Toshiba Corp | Deposition apparatus and deposition method using the same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50128333U (en) * | 1974-04-05 | 1975-10-21 |
-
1976
- 1976-03-10 JP JP2505676A patent/JPS52108380A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50128333U (en) * | 1974-04-05 | 1975-10-21 |
Also Published As
Publication number | Publication date |
---|---|
JPS5527623B2 (en) | 1980-07-22 |
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