JPS5332887A - Hottcathode discharge ionic plating apparatus of multiianode type - Google Patents
Hottcathode discharge ionic plating apparatus of multiianode typeInfo
- Publication number
- JPS5332887A JPS5332887A JP10691976A JP10691976A JPS5332887A JP S5332887 A JPS5332887 A JP S5332887A JP 10691976 A JP10691976 A JP 10691976A JP 10691976 A JP10691976 A JP 10691976A JP S5332887 A JPS5332887 A JP S5332887A
- Authority
- JP
- Japan
- Prior art keywords
- multiianode
- hottcathode
- type
- plating apparatus
- ionic plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10691976A JPS5847465B2 (en) | 1976-09-07 | 1976-09-07 | Multi-anode hot cathode discharge type ion plating equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10691976A JPS5847465B2 (en) | 1976-09-07 | 1976-09-07 | Multi-anode hot cathode discharge type ion plating equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5332887A true JPS5332887A (en) | 1978-03-28 |
JPS5847465B2 JPS5847465B2 (en) | 1983-10-22 |
Family
ID=14445822
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10691976A Expired JPS5847465B2 (en) | 1976-09-07 | 1976-09-07 | Multi-anode hot cathode discharge type ion plating equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5847465B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS608598A (en) * | 1983-06-24 | 1985-01-17 | Kubota Ltd | Method of filling heat insulating wall of heat insulating tank with powder |
JPH05295527A (en) * | 1991-08-08 | 1993-11-09 | Rikagaku Kenkyusho | Ion plating device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61166772U (en) * | 1985-04-01 | 1986-10-16 |
-
1976
- 1976-09-07 JP JP10691976A patent/JPS5847465B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS608598A (en) * | 1983-06-24 | 1985-01-17 | Kubota Ltd | Method of filling heat insulating wall of heat insulating tank with powder |
JPH05295527A (en) * | 1991-08-08 | 1993-11-09 | Rikagaku Kenkyusho | Ion plating device |
Also Published As
Publication number | Publication date |
---|---|
JPS5847465B2 (en) | 1983-10-22 |
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