JPS5332887A - Hottcathode discharge ionic plating apparatus of multiianode type - Google Patents

Hottcathode discharge ionic plating apparatus of multiianode type

Info

Publication number
JPS5332887A
JPS5332887A JP10691976A JP10691976A JPS5332887A JP S5332887 A JPS5332887 A JP S5332887A JP 10691976 A JP10691976 A JP 10691976A JP 10691976 A JP10691976 A JP 10691976A JP S5332887 A JPS5332887 A JP S5332887A
Authority
JP
Japan
Prior art keywords
multiianode
hottcathode
type
plating apparatus
ionic plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10691976A
Other languages
Japanese (ja)
Other versions
JPS5847465B2 (en
Inventor
Tsuneo Nishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP10691976A priority Critical patent/JPS5847465B2/en
Publication of JPS5332887A publication Critical patent/JPS5332887A/en
Publication of JPS5847465B2 publication Critical patent/JPS5847465B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10691976A 1976-09-07 1976-09-07 Multi-anode hot cathode discharge type ion plating equipment Expired JPS5847465B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10691976A JPS5847465B2 (en) 1976-09-07 1976-09-07 Multi-anode hot cathode discharge type ion plating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10691976A JPS5847465B2 (en) 1976-09-07 1976-09-07 Multi-anode hot cathode discharge type ion plating equipment

Publications (2)

Publication Number Publication Date
JPS5332887A true JPS5332887A (en) 1978-03-28
JPS5847465B2 JPS5847465B2 (en) 1983-10-22

Family

ID=14445822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10691976A Expired JPS5847465B2 (en) 1976-09-07 1976-09-07 Multi-anode hot cathode discharge type ion plating equipment

Country Status (1)

Country Link
JP (1) JPS5847465B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS608598A (en) * 1983-06-24 1985-01-17 Kubota Ltd Method of filling heat insulating wall of heat insulating tank with powder
JPH05295527A (en) * 1991-08-08 1993-11-09 Rikagaku Kenkyusho Ion plating device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61166772U (en) * 1985-04-01 1986-10-16

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS608598A (en) * 1983-06-24 1985-01-17 Kubota Ltd Method of filling heat insulating wall of heat insulating tank with powder
JPH05295527A (en) * 1991-08-08 1993-11-09 Rikagaku Kenkyusho Ion plating device

Also Published As

Publication number Publication date
JPS5847465B2 (en) 1983-10-22

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