JPS5346289Y2 - - Google Patents

Info

Publication number
JPS5346289Y2
JPS5346289Y2 JP3900074U JP3900074U JPS5346289Y2 JP S5346289 Y2 JPS5346289 Y2 JP S5346289Y2 JP 3900074 U JP3900074 U JP 3900074U JP 3900074 U JP3900074 U JP 3900074U JP S5346289 Y2 JPS5346289 Y2 JP S5346289Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3900074U
Other languages
Japanese (ja)
Other versions
JPS50128333U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3900074U priority Critical patent/JPS5346289Y2/ja
Publication of JPS50128333U publication Critical patent/JPS50128333U/ja
Application granted granted Critical
Publication of JPS5346289Y2 publication Critical patent/JPS5346289Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3900074U 1974-04-05 1974-04-05 Expired JPS5346289Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3900074U JPS5346289Y2 (cs) 1974-04-05 1974-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3900074U JPS5346289Y2 (cs) 1974-04-05 1974-04-05

Publications (2)

Publication Number Publication Date
JPS50128333U JPS50128333U (cs) 1975-10-21
JPS5346289Y2 true JPS5346289Y2 (cs) 1978-11-06

Family

ID=28162020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3900074U Expired JPS5346289Y2 (cs) 1974-04-05 1974-04-05

Country Status (1)

Country Link
JP (1) JPS5346289Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52108380A (en) * 1976-03-10 1977-09-10 Koito Mfg Co Ltd Gassintroducing system for ionic plating apparatus of high frequency energization type

Also Published As

Publication number Publication date
JPS50128333U (cs) 1975-10-21

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