JPS5345759A - Formation method for spot clean zone - Google Patents

Formation method for spot clean zone

Info

Publication number
JPS5345759A
JPS5345759A JP11985876A JP11985876A JPS5345759A JP S5345759 A JPS5345759 A JP S5345759A JP 11985876 A JP11985876 A JP 11985876A JP 11985876 A JP11985876 A JP 11985876A JP S5345759 A JPS5345759 A JP S5345759A
Authority
JP
Japan
Prior art keywords
clean zone
formation method
spot clean
spot
exterior
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11985876A
Other languages
Japanese (ja)
Inventor
Takao Chiba
Yoshiaki Shoji
Keiichi Okazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP11985876A priority Critical patent/JPS5345759A/en
Publication of JPS5345759A publication Critical patent/JPS5345759A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To simply form spot clean zone interrupted from exterior circumstances only by air current, by using a special blowoff suction port without using partition part materials and so on for interrupting from exterior circumstances at all.
COPYRIGHT: (C)1978,JPO&Japio
JP11985876A 1976-10-07 1976-10-07 Formation method for spot clean zone Pending JPS5345759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11985876A JPS5345759A (en) 1976-10-07 1976-10-07 Formation method for spot clean zone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11985876A JPS5345759A (en) 1976-10-07 1976-10-07 Formation method for spot clean zone

Publications (1)

Publication Number Publication Date
JPS5345759A true JPS5345759A (en) 1978-04-24

Family

ID=14772006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11985876A Pending JPS5345759A (en) 1976-10-07 1976-10-07 Formation method for spot clean zone

Country Status (1)

Country Link
JP (1) JPS5345759A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60204420A (en) * 1984-03-23 1985-10-16 三浦　保弘 Small bag charger
JPH01179841A (en) * 1988-01-05 1989-07-17 Mitsubishi Heavy Ind Ltd Fluid processing device
CN1098262C (en) * 1996-12-26 2003-01-08 宇部兴产株式会社 Acid addition salts of optically active piperidine compounds and process for preparing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60204420A (en) * 1984-03-23 1985-10-16 三浦　保弘 Small bag charger
JPH01179841A (en) * 1988-01-05 1989-07-17 Mitsubishi Heavy Ind Ltd Fluid processing device
CN1098262C (en) * 1996-12-26 2003-01-08 宇部兴产株式会社 Acid addition salts of optically active piperidine compounds and process for preparing the same

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