JPS5344793B2 - - Google Patents
Info
- Publication number
- JPS5344793B2 JPS5344793B2 JP13410375A JP13410375A JPS5344793B2 JP S5344793 B2 JPS5344793 B2 JP S5344793B2 JP 13410375 A JP13410375 A JP 13410375A JP 13410375 A JP13410375 A JP 13410375A JP S5344793 B2 JPS5344793 B2 JP S5344793B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13410375A JPS5258460A (en) | 1975-11-10 | 1975-11-10 | Diffusion of impurity into semiconductor wafer from solid impurity dif fusion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13410375A JPS5258460A (en) | 1975-11-10 | 1975-11-10 | Diffusion of impurity into semiconductor wafer from solid impurity dif fusion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5258460A JPS5258460A (en) | 1977-05-13 |
| JPS5344793B2 true JPS5344793B2 (it) | 1978-12-01 |
Family
ID=15120510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13410375A Granted JPS5258460A (en) | 1975-11-10 | 1975-11-10 | Diffusion of impurity into semiconductor wafer from solid impurity dif fusion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5258460A (it) |
-
1975
- 1975-11-10 JP JP13410375A patent/JPS5258460A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5258460A (en) | 1977-05-13 |