JPS5344786B2 - - Google Patents
Info
- Publication number
- JPS5344786B2 JPS5344786B2 JP3552075A JP3552075A JPS5344786B2 JP S5344786 B2 JPS5344786 B2 JP S5344786B2 JP 3552075 A JP3552075 A JP 3552075A JP 3552075 A JP3552075 A JP 3552075A JP S5344786 B2 JPS5344786 B2 JP S5344786B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3552075A JPS5344786B2 (cs) | 1975-03-26 | 1975-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3552075A JPS5344786B2 (cs) | 1975-03-26 | 1975-03-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51110964A JPS51110964A (cs) | 1976-09-30 |
| JPS5344786B2 true JPS5344786B2 (cs) | 1978-12-01 |
Family
ID=12444015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3552075A Expired JPS5344786B2 (cs) | 1975-03-26 | 1975-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5344786B2 (cs) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55108735A (en) * | 1979-02-13 | 1980-08-21 | Fujitsu Ltd | Method for maintenance of electron beam exposure device |
| JPS6338523Y2 (cs) * | 1981-06-15 | 1988-10-11 | ||
| JPH0760661B2 (ja) * | 1988-07-22 | 1995-06-28 | 株式会社日立製作所 | 電子顕微鏡 |
| JP4855135B2 (ja) * | 2006-05-15 | 2012-01-18 | 株式会社日立ハイテクノロジーズ | 差動排気走査形電子顕微鏡 |
| JP5065796B2 (ja) * | 2007-08-03 | 2012-11-07 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
| US8981294B2 (en) | 2008-07-03 | 2015-03-17 | B-Nano Ltd. | Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment |
| EP2329252A4 (en) * | 2008-09-28 | 2012-04-11 | Nano Ltd B | VACUUM DEVICE AND ELECTRONIC SCAN MICROSCOPE |
| EP2959287A4 (en) | 2013-02-20 | 2016-10-19 | Nano Ltd B | scanning Electron Microscope |
| KR102839263B1 (ko) * | 2023-11-24 | 2025-07-28 | 한국표준과학연구원 | 대물 렌즈 커버 및 이를 포함하는 하전입자선 장치 |
-
1975
- 1975-03-26 JP JP3552075A patent/JPS5344786B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51110964A (cs) | 1976-09-30 |