JPS53446A - Oprating device for ags instrument - Google Patents

Oprating device for ags instrument

Info

Publication number
JPS53446A
JPS53446A JP7491876A JP7491876A JPS53446A JP S53446 A JPS53446 A JP S53446A JP 7491876 A JP7491876 A JP 7491876A JP 7491876 A JP7491876 A JP 7491876A JP S53446 A JPS53446 A JP S53446A
Authority
JP
Japan
Prior art keywords
oprating
ags
instrument
main shaft
rotatably
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7491876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS562245B2 (OSRAM
Inventor
Kiyoshi Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Noritz Corp
Original Assignee
Noritz Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Noritz Corp filed Critical Noritz Corp
Priority to JP7491876A priority Critical patent/JPS53446A/ja
Publication of JPS53446A publication Critical patent/JPS53446A/ja
Publication of JPS562245B2 publication Critical patent/JPS562245B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding And Controlling Fuel (AREA)
JP7491876A 1976-06-23 1976-06-23 Oprating device for ags instrument Granted JPS53446A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7491876A JPS53446A (en) 1976-06-23 1976-06-23 Oprating device for ags instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7491876A JPS53446A (en) 1976-06-23 1976-06-23 Oprating device for ags instrument

Publications (2)

Publication Number Publication Date
JPS53446A true JPS53446A (en) 1978-01-06
JPS562245B2 JPS562245B2 (OSRAM) 1981-01-19

Family

ID=13561232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7491876A Granted JPS53446A (en) 1976-06-23 1976-06-23 Oprating device for ags instrument

Country Status (1)

Country Link
JP (1) JPS53446A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS537849A (en) * 1976-07-09 1978-01-24 Noritsu Co Ltd Gas instrument operating apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58132934A (ja) * 1982-02-03 1983-08-08 Nec Corp 半導体ウエハ−の水洗方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS537849A (en) * 1976-07-09 1978-01-24 Noritsu Co Ltd Gas instrument operating apparatus

Also Published As

Publication number Publication date
JPS562245B2 (OSRAM) 1981-01-19

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