JPS534432B2 - - Google Patents
Info
- Publication number
- JPS534432B2 JPS534432B2 JP2749574A JP2749574A JPS534432B2 JP S534432 B2 JPS534432 B2 JP S534432B2 JP 2749574 A JP2749574 A JP 2749574A JP 2749574 A JP2749574 A JP 2749574A JP S534432 B2 JPS534432 B2 JP S534432B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2749574A JPS534432B2 (ja) | 1974-03-08 | 1974-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2749574A JPS534432B2 (ja) | 1974-03-08 | 1974-03-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50120888A JPS50120888A (ja) | 1975-09-22 |
| JPS534432B2 true JPS534432B2 (ja) | 1978-02-17 |
Family
ID=12222706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2749574A Expired JPS534432B2 (ja) | 1974-03-08 | 1974-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS534432B2 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998028608A1 (en) * | 1996-12-24 | 1998-07-02 | Koninklijke Philips Electronics N.V. | Optical inspection device and lithographic apparatus provided with such a device |
| JP4756299B2 (ja) * | 2001-06-08 | 2011-08-24 | 日産自動車株式会社 | 表面欠陥検査装置 |
-
1974
- 1974-03-08 JP JP2749574A patent/JPS534432B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50120888A (ja) | 1975-09-22 |