JPS5343022B2 - - Google Patents
Info
- Publication number
- JPS5343022B2 JPS5343022B2 JP11745676A JP11745676A JPS5343022B2 JP S5343022 B2 JPS5343022 B2 JP S5343022B2 JP 11745676 A JP11745676 A JP 11745676A JP 11745676 A JP11745676 A JP 11745676A JP S5343022 B2 JPS5343022 B2 JP S5343022B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- X-Ray Techniques (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11745676A JPS5342678A (en) | 1976-09-30 | 1976-09-30 | X-ray exposure method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11745676A JPS5342678A (en) | 1976-09-30 | 1976-09-30 | X-ray exposure method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5342678A JPS5342678A (en) | 1978-04-18 |
| JPS5343022B2 true JPS5343022B2 (enExample) | 1978-11-16 |
Family
ID=14712104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11745676A Granted JPS5342678A (en) | 1976-09-30 | 1976-09-30 | X-ray exposure method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5342678A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5399770A (en) * | 1977-02-10 | 1978-08-31 | Hitachi Ltd | Soft x-ray transfer mask |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3742229A (en) * | 1972-06-29 | 1973-06-26 | Massachusetts Inst Technology | Soft x-ray mask alignment system |
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1976
- 1976-09-30 JP JP11745676A patent/JPS5342678A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5342678A (en) | 1978-04-18 |