JPS5342396B2 - - Google Patents

Info

Publication number
JPS5342396B2
JPS5342396B2 JP7280273A JP7280273A JPS5342396B2 JP S5342396 B2 JPS5342396 B2 JP S5342396B2 JP 7280273 A JP7280273 A JP 7280273A JP 7280273 A JP7280273 A JP 7280273A JP S5342396 B2 JPS5342396 B2 JP S5342396B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7280273A
Other versions
JPS5023585A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7280273A priority Critical patent/JPS5342396B2/ja
Publication of JPS5023585A publication Critical patent/JPS5023585A/ja
Publication of JPS5342396B2 publication Critical patent/JPS5342396B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP7280273A 1973-06-29 1973-06-29 Expired JPS5342396B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7280273A JPS5342396B2 (ja) 1973-06-29 1973-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7280273A JPS5342396B2 (ja) 1973-06-29 1973-06-29

Publications (2)

Publication Number Publication Date
JPS5023585A JPS5023585A (ja) 1975-03-13
JPS5342396B2 true JPS5342396B2 (ja) 1978-11-10

Family

ID=13499873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7280273A Expired JPS5342396B2 (ja) 1973-06-29 1973-06-29

Country Status (1)

Country Link
JP (1) JPS5342396B2 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51136537A (en) * 1975-05-21 1976-11-26 Hosiden Electronics Co Method of forming pattern by evaporation deposition
US4517225A (en) * 1983-05-02 1985-05-14 Signetics Corporation Method for manufacturing an electrical interconnection by selective tungsten deposition
JPS6126245A (ja) * 1984-07-16 1986-02-05 Mitsubishi Electric Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5023585A (ja) 1975-03-13

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