JPS5340274B2 - - Google Patents

Info

Publication number
JPS5340274B2
JPS5340274B2 JP7068275A JP7068275A JPS5340274B2 JP S5340274 B2 JPS5340274 B2 JP S5340274B2 JP 7068275 A JP7068275 A JP 7068275A JP 7068275 A JP7068275 A JP 7068275A JP S5340274 B2 JPS5340274 B2 JP S5340274B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7068275A
Other languages
Japanese (ja)
Other versions
JPS5111684A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5111684A publication Critical patent/JPS5111684A/ja
Publication of JPS5340274B2 publication Critical patent/JPS5340274B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/24Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/28Means for producing, introducing, or replenishing gas or vapour during operation of the lamp
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/52Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space

Landscapes

  • Discharge Lamps And Accessories Thereof (AREA)
  • Plasma Technology (AREA)
JP7068275A 1974-06-13 1975-06-11 Kokodofukushaookonausochi Granted JPS5111684A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US47887274A 1974-06-13 1974-06-13

Publications (2)

Publication Number Publication Date
JPS5111684A JPS5111684A (ja) 1976-01-29
JPS5340274B2 true JPS5340274B2 (xx) 1978-10-26

Family

ID=23901715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7068275A Granted JPS5111684A (ja) 1974-06-13 1975-06-11 Kokodofukushaookonausochi

Country Status (6)

Country Link
JP (1) JPS5111684A (xx)
CA (1) CA1015817A (xx)
DE (1) DE2525401C3 (xx)
FR (1) FR2275024A1 (xx)
GB (1) GB1468137A (xx)
NL (1) NL166580C (xx)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2310883A1 (en) 1999-06-07 2000-12-07 Norman L. Arrison Method and apparatus for fracturing brittle materials by thermal stressing
US6912356B2 (en) 1999-06-07 2005-06-28 Diversified Industries Ltd. Method and apparatus for fracturing brittle materials by thermal stressing
US6621199B1 (en) 2000-01-21 2003-09-16 Vortek Industries Ltd. High intensity electromagnetic radiation apparatus and method
JP5074039B2 (ja) * 2004-02-12 2012-11-14 マトソン テクノロジー カナダ インコーポレイテッド 高強度の電磁放射線発生装置及び発生方法
US7781947B2 (en) 2004-02-12 2010-08-24 Mattson Technology Canada, Inc. Apparatus and methods for producing electromagnetic radiation
JP2011014541A (ja) * 2010-07-09 2011-01-20 Mattson Technology Canada Inc 高強度の電磁放射線発生装置及び発生方法
DE102011089090B4 (de) * 2011-12-19 2014-07-03 Von Ardenne Anlagentechnik Gmbh Gasentladungslampe mit Kühleinrichtung
US9927094B2 (en) * 2012-01-17 2018-03-27 Kla-Tencor Corporation Plasma cell for providing VUV filtering in a laser-sustained plasma light source

Also Published As

Publication number Publication date
FR2275024B1 (xx) 1978-06-23
GB1468137A (en) 1977-03-23
JPS5111684A (ja) 1976-01-29
NL166580C (nl) 1981-08-17
DE2525401C3 (de) 1978-06-22
NL166580B (nl) 1981-03-16
DE2525401B2 (de) 1977-10-27
FR2275024A1 (fr) 1976-01-09
CA1015817A (en) 1977-08-16
NL7506545A (nl) 1975-12-16
DE2525401A1 (de) 1976-01-02

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