JPS5339749B2 - - Google Patents
Info
- Publication number
- JPS5339749B2 JPS5339749B2 JP12471876A JP12471876A JPS5339749B2 JP S5339749 B2 JPS5339749 B2 JP S5339749B2 JP 12471876 A JP12471876 A JP 12471876A JP 12471876 A JP12471876 A JP 12471876A JP S5339749 B2 JPS5339749 B2 JP S5339749B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12471876A JPS5349957A (en) | 1976-10-18 | 1976-10-18 | Focusing method for electronic beam exposure device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12471876A JPS5349957A (en) | 1976-10-18 | 1976-10-18 | Focusing method for electronic beam exposure device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5349957A JPS5349957A (en) | 1978-05-06 |
JPS5339749B2 true JPS5339749B2 (ja) | 1978-10-23 |
Family
ID=14892375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12471876A Granted JPS5349957A (en) | 1976-10-18 | 1976-10-18 | Focusing method for electronic beam exposure device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5349957A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS571713Y2 (ja) * | 1978-06-15 | 1982-01-12 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6182428A (ja) * | 1984-09-29 | 1986-04-26 | Toshiba Corp | 電荷ビ−ム光学鏡筒のレンズ調整方法 |
-
1976
- 1976-10-18 JP JP12471876A patent/JPS5349957A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS571713Y2 (ja) * | 1978-06-15 | 1982-01-12 |
Also Published As
Publication number | Publication date |
---|---|
JPS5349957A (en) | 1978-05-06 |