JPS5339749B2 - - Google Patents

Info

Publication number
JPS5339749B2
JPS5339749B2 JP12471876A JP12471876A JPS5339749B2 JP S5339749 B2 JPS5339749 B2 JP S5339749B2 JP 12471876 A JP12471876 A JP 12471876A JP 12471876 A JP12471876 A JP 12471876A JP S5339749 B2 JPS5339749 B2 JP S5339749B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12471876A
Other versions
JPS5349957A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12471876A priority Critical patent/JPS5349957A/ja
Publication of JPS5349957A publication Critical patent/JPS5349957A/ja
Publication of JPS5339749B2 publication Critical patent/JPS5339749B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
JP12471876A 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device Granted JPS5349957A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12471876A JPS5349957A (en) 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12471876A JPS5349957A (en) 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device

Publications (2)

Publication Number Publication Date
JPS5349957A JPS5349957A (en) 1978-05-06
JPS5339749B2 true JPS5339749B2 (ja) 1978-10-23

Family

ID=14892375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12471876A Granted JPS5349957A (en) 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device

Country Status (1)

Country Link
JP (1) JPS5349957A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571713Y2 (ja) * 1978-06-15 1982-01-12

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182428A (ja) * 1984-09-29 1986-04-26 Toshiba Corp 電荷ビ−ム光学鏡筒のレンズ調整方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571713Y2 (ja) * 1978-06-15 1982-01-12

Also Published As

Publication number Publication date
JPS5349957A (en) 1978-05-06

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